激光技术及其应用ppt课件

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1、电子工程学院电子工程学院20152015年年1 1月月1818日日1飞秒激光技术激光与物质相互作用机理微纳加工应用出访院校介绍溅射沉积镀膜技术激光雷达技术总结与期望具有激光的共同特点，同时1.超短脉冲 1fs=101fs=10-15-15 s s2.超强功率（瞬时功率，可达到百万亿瓦）当它被聚焦到亚微米的空间区域，激光电磁场的强度比原子核对其周围电子的作用力还要高数倍。1、飞秒激光技术Sallie Gardner Running 脉冲宽度极短 1fs=10-15秒(电子绕原子核半周的时间)微观世界超快过程的研究 物理 化学 生物学1、飞秒激光技术Time Microscopy femtosec

2、ond laserAhmed H.Zewail 1999 Nobel Prize Femto-Chemistry 1、飞秒激光技术10121015W10181021W/cm2 (E=1011V/cm 氢原子库仑场5109V/cm）极端物理条件 光压 1091012bars 磁场 109高斯 加速度 1021g(1022m/s2)温度 108 聚焦1、飞秒激光技术飞秒飞秒激光激光飞秒激光飞秒激光的产生的产生超快科学超快科学（探测认识某些超快物理过程）物理 化学 生物学超快技术超快技术 电子学（光电取样）光通讯 成像 共焦显微 OCT飞秒激光飞秒激光的放大的放大超快超强科学超快超强科学（创造一个极

3、端物理条件）飞秒等离子体 强场下电子的相对论运动 Selfchanneling相对论自聚焦 千兆巴激光压力 尾场等离子体波未来科未来科学技术学技术新突破新突破未来科未来科学技术学技术新突破新突破 飞秒相干x射线及x激光 （高次谐波，汤姆逊效应）x光显微术,x光印刷术,x光照相 激光热核聚变快速点火 激光粒子加速器 THz毫米波技术 云层放电 超高速计算机 超高速光通讯 生物技术（合成生物分子）医学（OCT）微加工技术1、飞秒激光技术Oscillator Stretcher（103-105）Amplifier（103）Compressor（103-105）啁啾脉冲放大啁啾脉冲放大1飞秒激光技术Y

4、VO4Ti:s oscillatorS E S AMGain amplifierStretcherEnergy amplifierCompressorPre-amplifierGRPC1Ti:sPC2532nm Nd:YAG532nm Nd:YAG532nm Nd:YAGTi:sTi:sGRGR1、飞秒激光技术1、飞秒激光技术1、飞秒激光技术1、飞秒激光技术500600700800900100011001200-16-14-12-10-8-6-4-20Intensity(dBm)Wavelength(nm)B1、飞秒激光技术400500600700800900100011001200-25-2

5、0-15-10-505101543215Intensity(dBm)Wavelength(nm)1 Input Spectrum2 100mW3 200mW4 300mW5 400mW400500600700800900100011001200-25-20-15-10-505101551234Intensity(dBm)Wavelength(nm)1 Input Spectrum2 100mW3 200mW4 300mW5 400mW1、飞秒激光技术1、飞秒激光技术抽运光功率提高到 后，压缩后脉冲宽度为，此时脉冲宽度最窄，单脉冲能量为，峰值功率1、飞秒激光技术1、飞秒激光技术2、激光与物质相互

6、作用机理与金属作用的双温方程模型 与聚合材料作用的n光子吸收模式 与电介质相互作用的动力学方程 2、激光与物质相互作用机理XmXdzx In（x）发生多光子过程的空间区域更小 多光子 In（t）吸收几率 发生多光子过程的时间范围更小 Xd Xm 2、激光与物质相互作用机理2、激光与物质相互作用机理 )exp(-z)(aieeeeITTgTxkxTtC 1975、S.I.Anisimov et.al从一维非稳态热传导方程出发，考虑到超强脉冲时光子与电子及电子与晶格两种不同的相互作用过程，列出了电子与晶格的温度变化微分方程，即双温方程：2、激光与物质相互作用机理 1975、S.I.Anisimov

7、 et.al从一维非稳态热传导方程出发，考虑到超强脉冲时光子与电子及电子与晶格两种不同的相互作用过程，列出了电子与晶格的温度变化微分方程，即双温方程：(2)(1),()(ieiiieeeeTTgTtCtxATTgTxkxTtC2、激光与物质相互作用机理012345620040060080010001200140016001800g=0.4(1017w/m3K)0.81.2Electron Temperature(k)Delay Time(ps)020040060080010002003004005006007008009001000Electronics temperature(K)Time(

8、fs)020406080100120300400500600700800900Electronics temperature(k)Time(ps)2、激光与物质相互作用机理2、激光与物质相互作用机理2、激光与物质相互作用机理2、激光与物质相互作用机理与金属作用的双温方程模型 与聚合材料作用的n光子吸收模式 与电介质相互作用的动力学方程 3、微纳加工应用3、微纳加工应用LaserBeam ExpanderMirrorLensZ-axisSampleX-Y axisComputer3、微纳加工应用树脂材料3、微纳加工应用树脂材料3、微纳加工应用树脂材料3、微纳加工应用玻璃Glass wavegui

9、deGlass machining100 um hole array in doped-glass for fibre alignmentGrid structures in soda-lime glassMicro-channels for optical switch3、微纳加工应用金属20-um stainless steelCut width:10 umS.Steel:20um/50um300um thick nitinol,50um slotCopper:top view(left)and X-view 30um/1300um3、微纳加工应用其他3、微纳加工应用其他3、微纳加工应用其

10、他3、微纳加工应用其他飞秒激光在PMMA材料内部加工三维点阵下层点列（脉冲能量:2.87 nJ）3、微纳加工应用其他 3、微纳加工应用其他3、微纳加工应用其他Laser beam原则已有交流基础或合作关系通过联系人介绍自己联系Naples and the University Federico IINaplesView of the gulfA squareA small streetUniversity Federico IINowadays the university is made up of thirteen schools,eightytwo departments,an acad

11、emic staff of more than 3,120 individuals and an administrative staff of more than 4,500.Current student enrollment is still about 97,000.中国意大利合作项目研究人员往来政府资助基金（Grant No.N10MO2）:Ultrafast laser ablation of solid targets and nanoparticles synthesis，2010.12012.12 CNR-SPIN:意大利国家研究委员会意大利国家研究委员会 -超导与新材料超导

12、与新材料器件研究所器件研究所MaMa fundMaMa fundCNR-SPIN:意大利国家研究委员会意大利国家研究委员会 -超导与新材料超导与新材料器件研究所器件研究所MaMa fundMaMa fundDTU FotonikJrgen SchouTechnical University of DenmarkMain activityFundamentals of laser ablation CNR-SPIN:意大利国家研究委员会意大利国家研究委员会 -超导与新材料超导与新材料器件研究所器件研究所MaMa fundMaMa fundDTU-Technical University of D

13、enmarkDTU Energy Conversion Department of Energy Conversion and StorageNini Pryds(Head of Section)Main activitiesEnergy materials;Oxides;PLD China National Scholarship FundChina National Scholarship Fund Legend Elite Amplifier:800nm,40fs,1KHz,4WMartic Oscillator:800 nm,20 fs,80MHz6 nJ Per pulseCoppe

14、rLangmuirprobeVacuum=10-6 mbarM1M2M3PM2PM1PinholeLensICCDL25 溅射沉积镀膜技术Laser beamlaser beamsubstratevacuum/background gastargetlaser produced plasma plume Surface processing Transient Plasma NPs&NPs-assembled filmsOther fields of Other fields of applicationapplicationLIBS for material analysisIon beam

15、 generationEUV light generationm-thruster for satellites3D structuring(dielectrics)Templates for cell growth.Jrgen SchouNini Pryds(Head of Section)完成金属（Cu、Fe）、半导体（Si）以及化合物（TiO2）样品的烧蚀电子、离子空间时域分布进行分析以及纳米颗粒沉积特性实验研究；与丹麦技术大学（Technical University of Technical University of DenmarkDenmark）光子工程系（Department

16、Department of Photonics Engineeringof Photonics Engineering）和能量转换与存贮系（Department of Energy Conversion and Department of Energy Conversion and StorageStorage）开展纳秒激光与蛋白质（Protein）作用烧蚀阈值实验和纳秒激光与Al2O3作用是等离子羽状物的空间分布以及飞行光谱的采集与处理实验分析研究；利用业余时间积极开展第二科研方向Caliposo激光雷达信号数据处理工作。PlumetargetAtomicNPsDeposited NPsel

17、ectrons subsystem heatinglattice heatingelectrons-to-lattice energy transferTimeduring pulseafter pulsefspsnstarget melting and decompositionmaterial ejection and plume expansiontp-electronslattice+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-+-equilibriumablationPhoto of a silver fs ablation plume.at later timeL

18、egend Elite Amplifier:800nm,40fs,1KHz,4WMartic Oscillator:800 nm,20 fs,80MHz6 nJ Per pulseCopperLangmuirprobeVacuum=10-6 mbarM1M2M3PM2PM1PinholeLensICCDL2激光脉冲能量为10.7J/cm2时铜离子时间飞行（TOF）不同角度电压和电流强度曲线 ICCDL2300400500600700800900051015202530 Signal(arb.units)Wavelength(nm)1.01.52.02.53.0-70-68-66-64-62 l

19、n(I 5)1/(mm-1)T=(2240 30)K2002503003504000100200300400 Signal(arb.units)Wavelength(nm)Nanoparticles plume emissionAtomic plume emissiontD=280 ns 100011511324152417542018232226723075353940724686539362067142821894571.088E41.252E41.441E41.659E41.909E42.000E4-50505101520 x(mm)y(mm)tD=17.5 ms -5050510152

20、0 x(mm)y(mm)tD=280 ns 100011511324152417542018232226723075353940724686539362067142821894571.088E41.252E41.441E41.659E41.909E42.000E4-50505101520 x(mm)y(mm)01tD=280 ns 100011511324152417542018232226723075353940724686539362067142821894571.088E41.252E41.441E41.659E41.909E42.000E4-50505101520 x(mm)y(mm)

21、01ICCDL2A high-mobility two-dimensional electron gas at the spinel/perovskite interface of-Al2O3/SrTiO3Y.Z.Chen,2013,Nature Communications A high-mobility two-dimensional electron gas at the spinel/perovskite interface of-Al2O3/SrTiO3Y.Z.Chen,2013,Nature Communications List of materialsAl,Ag,Au,Cu,P

22、d,Ni,Co,Fe,Mn,Si,Ge,NiFe,CoCu,SmCo,AlN,CdS,ZnS,TiO2,ZnO,VO2,LSMO,TbDyFe,!?What is next?!substrateNP shape at AFMEquivalent sphere 343Va oblate ellipsoid with volume Va010203040506001020 Relative frequency(%)In-plane diameter DIn-plane diameter0510150.00.10.20.30.40.50.6 Relative frequency Aspect rat

23、io D/hAspect ratio0.02.55.07.510.012.515.00.00.10.20.3 Relative frequency NPs equivalent spherical radius a(nm)Equivalent spherical radiussubstrateNP shape at AFMEquivalent sphere 343Va oblate ellipsoid with volume Va脉冲能量为2.23mJ时曝光10s的纳米颗粒AFM扫描图像 脉冲能量为2.23mJ，能流密度为10.7J/cmP2P时曝光10s的纳米颗粒AFM统计图AFM imag

24、e of the filmHysteresis loop of a Nickel NPs-assembled filmAFM image of a nickel NPs-assembled film.b)CdS,527 nm,440 m mJ1 mm1 mm300400500600700800900050010001500 CdS on Sipump 325 nmPL signal(arb.units)Wavelength(nm)PhotoluminescenceLaser Induced Periodic Laser Induced Periodic Surface StructuresSu

25、rface Structures There is no general consensus on the origin of ripplesripples(LIPSS).The most considered explanation is based on an interference between the incident beam and a scattered surface wave(also in form of Surface Plasmon Polariton)induced by the surface roughness.Ripples 近红外激光烧蚀效率和能流密度关系

26、曲线（a）飞秒激光实验结果（1054nm）（b）纳秒激光实验结果（1064nm，Danmark）0.00.51.01.52.02.53.00510152025 ablation rate/pulse(mg)Fluence(J/cm2)=1054 nm,tL=850 fs0.00.20.40.60.00.20.40.60.81.0 ablation rate/pulse(mg)Fluence(J/cm2)Lidar stands for light detection and ranging and is a radar-related(radiowave detection and rangi

27、ng)method to remotely measure atmospheric parameters.Lidar systems send out laser pulses and detect the backscattered radiation.From the signals time delay and the speed of light,the distance from the backscatter location can be determined.P0:Laser powerA:Telescope areah:Overlap functionb:Backscatte

28、ring coefficient:Extinction coefficientLidar equation(single scattering):Backscattering Lidar(mono-,multi-wavelengths)Scanning,Volume Imaging,Depolarization,Fluorescence Aerosol,Cloud,Dust,Organic dust,Raman Lidar,High Spectral Resolution LidarAerosol,Cloud,Dust Water vapor,Temperature,DIAL LidarPol

29、lution molecules(SO2,CO,CO2,NO2,NO,),O3,Doppler LidarWind speed profileClassification by Principle:Ground basedAtmosphere profile,3D,local Airborne large area,Atmosphere,Earth and sea surface,Sea bottom SpaceborneglobalClassification by Platform:0510152025024KE=66 eVY+Ni+signal(mV)time(ms)Y+BC+Ni+C+

30、BC+B+H+Characteristics of Backscatter Lidar System TransmitterLaserNd:YAG or Excimer Laser(XeF)Wavelength1064,532,355 nm or 351 nmOutput energy1 50 mJ/pulsePulse repetition rate20-1000 HzPulse width5-20nsBeam divergence0.2-0.6 mradReceiverTelescope35 cm Newtonian,f=120cmField of view1.5 mradFilter b

31、andwidth1-2 nmVertical resolution3 m(raw),15 m(final)Airborne Lidar SystemGPS ground reference stationAircraft GPSGPS satellitesFlight directionLaser scan linesALTM laser and IMUAirborne Lidar System正交偏振云和气溶胶正交偏振云和气溶胶激光雷达激光雷达CALIOPCALIOP宽视场相机宽视场相机WFC WFC 成像红外辐射计成像红外辐射计IIRIIRCALIPCALIP是一台偏振敏感双波长（是一台偏

32、振敏感双波长（532nm/1064nm532nm/1064nm）激光雷达）激光雷达92 Caliop 激光雷达CALIPSO卫星在轨道上的运行速度是7km/秒激光器二极管泵浦一缕石榴石晶体激光器脉冲能量532nm的为110mJ1064nm的为110mJ重复频率20.16Hz脉冲长度20ns线宽532nm：30pm；1064nm：100pm极化纯度1000:1（532nm）光束发散角100urad（在光束扩展之后）瞄准范围1，分辨率 1.6 rad激光的环境18psia，干燥的空气93 CALIOP发射接收系统光学路径9496数据空间分辨率 Geographic coordinates,deg

33、Altitude,km CALIPSO Total Attenuated Backscattering at 532nm(b)5X beam expandersNapoli Lidar Experimental Setup387 nm Raman407 nm Raman355 nm Elastic532 nm Elastic607 nm RamanSummary of Multi-wavelength Raman LidarLaser SourceNd-YAGWavelength355,532,1064 nmPulse duration5 nsecPulse Energy 100 mJ 355

34、 nm 90 mJ 532 nm 300 mJ 1064 nmReperate20 HzDivergence0.1 mrad 1064 nm0.1 mrad 532 nm0.1 mrad 355 nmReceiver systemTelescopeNewtonian30 cmField of View1.3 mradElastic Channel355 nm BW 0.5 nm 532 nm BW 0.5 nmDepolarization Channel532 nmParallel&PerpendicularN2 Raman Channel 386.7nm BW 0.5 nm607 nm BW

35、 1.0 nmH2O Raman 406.7nm BW 0.5 nm23:0024:0001234567 013.6727.3441.0254.6968.3682.0395.70109.4123.0136.7150.4164.1177.7191.4205.1218.8232.4246.1259.8273.4287.1300.8314.5328.1341.8355.5369.1382.8396.5410.2423.8437.5451.2464.8478.5492.2505.9519.5533.2546.9560.5574.2587.9601.6615.2628.9642.6656.3669.96

36、83.6697.3710.9724.6738.3752.0765.6779.3793.0806.6820.3834.0847.7861.3875.0888.7902.3916.0929.7943.4957.0970.7984.4998.01012102510391053106610801094110711211135114811621176118912031217123012441258127112851299131313261340135413671381139514081422143614491463147714901504151815311545155915721586160016131

37、627164116541668168216951709172317361750Time-GMTAltitude asl-KmNapoli 19,20 August 2006-RCS at 532nm01:0002:0003:000510 RCS,arbitrary units(a)0123456789101E-41E-30.01 Signals-a.u.Altitude a.s.l.-km Calipso Napoli024 Backscatter Coefficientx 10-6 sr-1 m-1 CESC Raman method0.00.30.60.9 Extinction Coeff

38、icientx 10-3 m-1 CESC Raman method(a)(b)(c)Lidar Characterization of Volcanic Dust106Conference of Laser Ablation-COLA,2013.10.06-111.Lixia Sang,Hongjie Zhang,Xiaochang Ni,K.K.Anoop,Rosalba Fittipaldi,Xuan Wang,Salvatore Amoruso,Hydrogen-evolving photoanode of TiO2 nanoparticles film deposited by a

39、femtosecond laser,International Journal of Hydrogen Energy,2015,40(1):779-785 2.Yao Huan,Ni Xiaochang,Wang Xuan,Li Tong,Xu Lijuan,Song Zhenming.The relevant research on AOD and concentration of PM2.5 pollutantA;The Second International Conference on Frontiers in Optical Imaging Technology and Applic

40、ationC;20143.Xiaochang Ni,Lixia Sang,Hongjie Zhang,Anoop K.K.,S.Amoruso,Xuan Wang,R.Fittipaldi,Tong Li,Minglie Hu,Lijuan Xu,Femtosecond laser deposition of TiO2 nanoparticle-assembled films with embedded CdS nanoparticles,Optoelectronics Letters.10（1）43-46，20144.Xiaochang Ni,K.K.Anoop,X.Wang*,D.Papa

41、ro,S.Amoruso,R.Bruzzese,Dynamics of femtosecond laser-produced plasma ions,Applied Physics A,2014,117:1111155.Xiaochang Ni*,Anoop K.K,Mario Bianco,Salvatore Amoruso,Xuan Wang,Tong Li,Minglie Hu,Zhenming Song,Ion dynamics in ultrafast laser ablation of a copper target,Chinese Optics Letters,2013,11(9

42、):093201-5 6.D.K.Pallotti,X.Ni,R.Fittipaldi,X.Wang,S.Lettieri,A.Vecchione&S.Amoruso,Laser ablation and deposition of titanium dioxide with ultrashort pulses at 527 nm,Appl.Phys.B,2015,s00340-015-6024-17.K.K.Anoop,Xiaochang Ni,Xuan Wang,Riccardo Bruzzese,and Salvatore Amoruso,Spectrally Resolved Imag

43、ing of Ultrashort Laser Produced Plasma,IEEE TRANSACTIONS ON PLASMA SCIENCE,2014,VOL.42,NO.10:2698-26998.K.K.Anoop,Xiaochang Ni,Salvatore Amoruso,Xuan Wang,Riccardo Bruzzese,Fast ions generation in femtosecond laser ablation of a solid metallic target,Laser Phys.24(2014)105902(6pp)9.K.K.Anoop,Xiaoch

44、ang Ni,M.Bianco,M.Paparo,X.Wang,R.Bruzzese,S.Amoruso,Two-dimensional imaging of atomic and nanoparticle components in copper plasma plume produced by ultrafast laser ablation,Applied Physics A,2014,117:31331810.参与Christoph Gerhard,Stephan Wieneke,and Wolfgang Vil 编辑书籍“Laser Ablation Fundamentals,Met

45、hods and Applications”中第五章节的撰写工作K.K.Anoop,Xiaochang Ni,Xuan Wang,Giovanni Ausanio,and Salvatore Amoruso,Chapter 5:Ultrafast laser ablation of solid targets:A versatile method for fast ion generation and nanoparticle synthesis,Nova Science Publishers,New York(2015)合作共赢错位发展你中有我我中有你立足长远注意形象自我保护立志自信立德树人学无止境110111112113114115116117118119120121122123124125126127128129130飞秒激光技术激光与物质相互作用机理微纳加工应用溅射沉积镀膜技术激光雷达技术132