烧结炉及其制造企业

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1、- 1 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24烧 结 炉 及 其 制 造 企 业白 路2013-4-21Fast Firing System - 2 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 中国电子科技集团第四十八研究所成立于1964年，位于中国湖南长沙，占地224亩。国家级微电子、太阳能电池、光电材料、电力电子、磁性材料专用设备的研发及生产专业机构。国内主要半导体设备供应基地、最大的太阳能电池制造和电子工业窑炉供应基地、应变式

2、薄膜压力传感器国家高新技术产业化示范工程基地。现有职工800人左右，其中研究员级高工17人，高级工程师81人，工程师287人， 国家级有突出贡献科技专家19人。1 中国电子48所 - 3 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-2448所烧结炉 - 4 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-242 合肥恒力 合肥恒力电子装备公司创建于1992年，合肥恒力是中国电子科技集团第43研究所的直属企业、安徽省高新技术企业，专业从事工业电窑炉、电子

3、电镀等表面处理装备以及相关电加热设备的开发、研制与生产。主要服务于厚膜电路、电子封装、电子元器件、电子材料、军工电子、太阳能光伏、新型锂电池能源等相关行业。 - 5 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 - 6 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-243 Rehm 锐德热力设备有限公司由 Johannes Rehm 于 1990 年创办，是一家回流焊接设备和电子行业专用干燥系统供应商，另外还是一家快速烧结系统和太阳能蓄电池金属化

4、专用太能干燥器制 造商。总部在德国，目前在中国成立锐德热力设备（东莞）有限公司 ，地址广东省东莞市长安镇。 - 7 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 Rehm Fast Firing Furnace - 8 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-244 Despatch Despatch Industries has specialized in thermal processing for over 100 years an

5、d is actively using this technical expertise to provide innovative solutions to critical applications in a broad range of markets and cutting edge technology worldwide. Global Headquarters in West Minneapolis, MN. - 9 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24Despatch Fast Firing

6、Furnace For highly efficient solar cells at the lowest possible cost, more solar manufacturers choose Despatch Firing Furnaces than any other brand. SolectFire is a critical advancement because it opens the process window and gives the operator unique independent open and closed loop control of the

7、top and bottom of each firing zone. Operators have the ability to optimize the firing of the top and bottom of the cell to the silver side and the aluminum side independently, without compromise to either. - 10 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24Despatch Fast Firing Furnace

8、 - 11 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-245 BTU BTU International is a leading global supplier of advanced thermal processing equipment and processes to the alternative energy and electronics assembly markets. BTU equipment and know-how are used in solar cell, nuclear fuel a

9、nd fuel cell manufacturing as well as in the production of printed circuit board assemblies and semiconductor packaging. BTU has operations in Billerica, MA, USA and Shanghai, China with a sales and service presence in over 30 countries. Roughly half the companys approximately 400 employees are loca

10、ted outside the US. In 2010, BTU will celebrate its sixtieth anniversary. Since 1950, and with over 10,000 units shipped, BTU International has been the trusted name for high-tech customers with a need to solve high-volume thermal processing challenges. We have over 200 patents and patents pending.

11、- 12 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 BTU Fast Firing Furnace - 13 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 Roth & Rau is a German solar energy company founded in 1991. It has been going on for more than 10 years that Roth & Rau is focused on develop

12、ment and manufacturing of plasma process systems for photovoltaics industry and belongs to the worldwide leading providers in this area. Roth & Rau and his subsidiaries employ around 800 employees worldwide. Furthermore since 2011 Roth & Rau belongs to Swiss Meyer Burger Group. Meyer Burger is also

13、acting in business area of manufacturing equipment for photovoltaics industry and employs around 2,000 employees overall. 6 Roth & Rau - 14 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 Roth & Rau Fast firing furnace The firing furnace CAMiNI by Roth & Rau includes a specific transpo

14、rt system consisting of a series of ceramic rollers moving the wafers through the furnace free from metallic contamination in contrast to metal conveyer belt transportation systems. Furthermore, the novel transport principle allows a smaller footprint, a water-free cooling system and is less energy

15、consuming. 8 separately controllable heating zones ensure an optimum temperature profile and, therefore, best contact firing results. - 15 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-247 Tp Solar TP Solar, Inc. was founded by furnace experts who pioneered IR furnaces and set the indus

16、try standards for the PV industry in the early 1980s in Paramount, CA. - 16 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24 TP Solar, Inc provides quality in-line furnaces to the photovoltaic industry. The MD Series infrared furnaces feature advanced closed-loop precision temperature c

17、ontrols and a vibration-free transport system rated to 765 cm/min, improving typical mono-crystalline and-crystalline solar cell processing.Tp Solar Fast firing furnace - 17 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-248 Centrotherm Photovoltaics Centrotherm photovoltaics AG is the w

18、orlds leading technology and equipment provider for the photovoltaics sector. With more than 30 years of experience and an extensive, proven technology platform on almost all levels of the photovoltaic value chain, the company sees itself as a pioneer in the industry. Our strengths include the devel

19、opment of new technologies and innovations and their implementation in modern production systems and efficient processes. - 18 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24Centrotherm Fast Firing Furnace - 19 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24lHigh heat-up

20、and cool-down rates allow advanced process control and steep temperature gradientslIron-free transport belt (optional: wafer standoffs) and quartz glass belt support minimize process contaminationlDetailed continuous process monitoring and control ensure highest output qualitylShort-wave infrared ra

21、diators for a stable process environment with permanent function monitoringlSingle- or dual-lane versionslCase water cooling and advanced thermal insulation for lowest facility heat footprintIn-situ belt cleaning (brushes, optional: ultrasonic)ProcesseslFiring of front side metallizationlAlloying of

22、 rear side contactl Overcompensation of n+ layer and gettering of metallic impurities (Al-BSF formation)lRelease of hydrogen from SiN-layer for passivation of silicon defectslOptional: drying of metallization paste centrotherm Fast firing furnace - 20 -太 阳 能 系 统 研 究 所 Institute for Solar Energy Systems 2021-4-24Thank You！